"V Series" Roughing pump valve V-025RV
"V Series" Roughing pump valve V-025RV
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"V Series" Roughing pump valve V-025RV
This is a type-L valve that can be used in high vacuum range of up to 10-4Pa. This valve uses fluoro rubber (Viton) O-Ring for the vacuum seal and the shaft seal. Ideal as a valve for high vacuum equipment, or a roughing pump valve for the ultra-high vacuum equipment
Features
Can be used up to high vacuum range
Can be used in high vacuum range of about 10-4Pa. (Fluorine grease is used only on the shaft seal.)Open/Close position sensor switch
The air cylinder used in the compressed air powered valves has a position sensor switch for opening and closing.
Specifications
| Drive system | Air pressure | Manual | |
|---|---|---|---|
| Type | V-025RV-CN | V-025RV-MN | |
| Pressure range | Atmospheric to 10-4Pa | ||
| He leak*1 | Stationary | 6.7×10-11Pa·m3/sec or less | |
| Open/close | up to 10-5Pa·m3/sec | ||
| Conductance | 7L/sec | ||
| Allowableheating temperature | 60℃ | ||
| Main component material | Main unit | SUS-304 | |
| Moving part | AL alloy (air sealing) | Nylon 66, polypropylene (handle) | |
| Vacuum seal material | Fluoro rubber (Viton) O ring (main seal, shaft seal, bonnet seal) | ||
| Shaft seal lubricant: Perfluoropolyether grease | |||
| Operating air pressure | 0.4 to 0.6 MPa | - | |
| Air consumption (L /cycle)*2 | 0.024 | - | |
| Air supply inlet | M5 | - | |
| Open/close sensor | * See sensor switch specifications | - | |
| Used fluid | Atmosphere or gas (excluding corrosive gas) | ||
| Weight | 0.63kg | 0.58kg | |
| Connection flange*3 | NW25 flange | ||
* 1. Gas permeation of the fluoro rubber (Viton) O-Ring is out of specification.
* 2. Air consumption of 1 cycle (open-close) 0.5MPa air pressure.
* 3. NW25 flange is a clamp flange for vacuum equipment, using elastomer gaskets (mainly fluoro rubber). For details, please refer to the Quick Coupling section of our Vacuum Components plumbing parts catalogue.
