Cold Cathode Pirani Gauge M-360CP
Cold Cathode Pirani Gauge M-360CP
￥0.00
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Cold Cathode Pirani Gauge M-360CP
This is a combination gauge using Pirani gauge for low vacuum range measurement and cold cathode gauge for high vacuum range measurement. The cold cathode gauge has no burnout problem because no heated filament is used. A single device capable of measuring wide pressure range.
Features
Combination gauge combining cold cathode gauge with Pirani gauge
From 5×10-7Pa to atmospheric pressure
Capable of sensor cleaning
Applications
Analysis equipment such as electron microscopes, deposition apparatus, vacuum equipment such as vacuum furnaces, roughing pump and ultimate pressure measurement of semiconductor, electronic component manufacturing equipment etc.
Specifications
| Type | Cold Cathode Pirani Gauge | |
|---|---|---|
| M-360CP-SP Type with Set Point | M-360CP-RS RS485 Type | |
| Pressure measurement range | 5×10-7 to times;105(Pa) | |
| Input voltage | +15 to 30VDC | |
| Power consumption | 3W | |
| Analog output | 0 to 10V | - |
| Set point | 2 contact output (DC30V, 1A) | |
| Interface | - | RS485 |
| I/O connector | D‐sub 9 pin | |
| Maximum cable length | 300m (1mm2)*1 | |
| Protection standard | IP40 compatible | |
| Operating temperature range | 5 to 55℃ | |
| Storage temperature range | -20 to 70℃ (not operating) | |
| Sensor Type | CP-1 | |
| Sensor material (main component) | Filament: W, Electrode: Mo, Case: SUS304 | |
| Dimensions (mm) | 116×70×70 (NW25) | |
| Flange shape | NW25, NW40, φ70ICF | |
| Protection standard | IP40 | |
| RoHS, CE marking | Compatible | |
Dimensions
编号
Vacuum Gauges002
价格
￥0.00
