Crystal Gauge M-320XG
Crystal Gauge M-320XG
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Crystal Gauge M-320XG
Enables wide range highly reliable measurement from atmospheric pressure to 1×10-1Pa.
Provides excellent repeatability and constant measurement near atmospheric pressure through the use of phenomenon where crystal oscillator's resonant impedance changes according to pressure.
It can be used as a chamber atmospheric pressure vent detection pressure switch or for process pressure measurement.
Features
Wide measurement range
Enables measurement with excellent repeatability from atmospheric pressure to 1×10-1Pa.High stability
Crystal gauge is a vacuum gauge with no source of heat (filament).
Enables safe handling without affecting process gas.Compact and ultra-light weight
The controller fits in the palm of your hand weighing only 200g.
* A-NET Display M-390/M-391 These are displays exclusively made for M-320XG.
* They are single channel support models.
Applications
Roughing pump pressure measurement of various vacuum equipment
Various process pressure measurement
Detection pressure switch for chamber vent, etc.
Other pressure measurements from atmospheric pressure to 10-2Pa
Specifications
| Type | M-320XG | |
|---|---|---|
| Measurement ball | XG-1 Crystal Gauge Head (exclusive for crystal gauge) | |
| Pressure monitor range | 1×10-2Pa to atmospheric | |
| Measurement pressure range | 1×10-1Pa to atmospheric | |
| Gas type selections | N2, Ar, H2, Air | |
| Analog output (pressure signal) | 0 to 10VDC: Set output format of following items with digit switch 1. Log output 2. Multiple output 3. Linear output Full scale pressure range selectable (1×101, 1×102, 1×103, 1×104, 1×105Pa) | |
| Remote I/O | INPUT | 1. Set gas type switch with 2 bit signal 2. Zero adjustment 3. ATM setting |
| OUTPUT | 2 set point output | |
| Set point | 2 points (photocoupler output, fixed hysteresis) Set with digit switch (SP1, SP2 mantissa, exponent) | |
| Operating environment | 5℃ to 50℃ (including controller) Gauge head only withstand temperature 150℃ MAX | |
| Zero adjustment | PUSH switch or software adjustment by remote I/O | |
| Full scale adjustment | Adjustment by trimmer | |
| I/O connector | Dsub 15P | |
| Display | LED ×3 (PWR/ALM (Green/Red), SP1-Status (Green), SP2-Status (Green)) | |
| Power requirements | 22 to 33VDC, (maximum power consumption 2W) | |
| Dimensions (mm) | 72.5H×102W×44.5D (excluding gauge head) | |
| Weight | 200g (excluding gauge head) | |
| Sensor attaching flange | NW16, NW25, φ34ICF, φ70ICF | |
Dimensions
