The capacitance gauge M-342DG is a diaphragm gauge that enables accurate, stable pressure measurement with minimum zero adjustment.
This is achieved using a newly developed small silicon MEMS chip as the pressure sensor unit to minimize the influence from the outside environment such as changes in temperature, vibrations, and atmospheric pressure.
High precision, stable pressure measurement
・Excellent zero point stability.
・Has low temperature dependence providing excellent stability without the need of a temperature
adjustment mechanism.
・Excellent anti-vibration noise performance.
Compact and low power consumption
・200g, W46mm × H49mm × L70mm compact, lightweight.*1
・Power consumption 0.5W.
*1:Size and weight of the coupling NW16 specifications
Type | M-342DG | ||||
---|---|---|---|---|---|
-1D | -1N | -11 | -12 | -13 | |
Full scale pressure(Pa) | 13.33 | 133.3 | 1.333k | 13.33k | 133.3k |
(Torr) | 0.1 | 1 | 10 | 100 | 1000 |
Accuracy(% of reading) | 0.20(at 23℃) | ||||
Zero temperature drift coefficient(% of F.S./℃) | 0.01 | 0.005 | 0.002 | ||
Span temperature drift coefficient(% of reading/℃) | 0.01 | 0.005 | |||
Resolution(% of Full-scale) | 0.01 | 0.005 | |||
Lowest Reading(% of Full-scale) | 0.01 | ||||
Lowest Suggested Pressure for Reading(% of Full-scale) | 0.05 | ||||
Lowest Suggested Pressure for Control(% of Full-scale) | 0.5 | ||||
Response time(msec) | 100 | 30 | |||
pressure limit(Pa) | 200 kPa(absolute pressure) However, 130 kPa(absolute pressure)for M-342DG-1D(for NW16 & NW25, inner area must not be at positive pressure) | ||||
Input voltage(VDC) | +13.5~26.4 | ||||
Power consumtion(W) | 0.5 or less | ||||
Signal output(VDC) | 0 to 10 | ||||
Operating temperature(℃) | 0 to 50 | ||||
Storage temperature(℃) | -20 to 70(not operating) | ||||
Maximum cable length(m) | 100(0.3mm2) | ||||
Zero points adjustment methods | push switch,remote input | ||||
Connector type | D-sub 9 pin male(mating screw:#4-40inch) | ||||
Materials exposed to vacuum | Si,Glass,SUS304,sus316,Fluorine Rubber | ||||
Flange shape | NW16,NW25,8-VCR,φ70ICF | ||||
Degree of protection | IP40 | ||||
Standards | Low Voltage Directive, EMC Directive, RoHS Directive | ||||
Security Export Control Regulation | Not applicable | ||||
Display | M-601GC(1ch)、M-603GC(3c) |