Capacitance Diaphragm Gauge M-342DG

Capacitance Diaphragm Gauge M-342DG

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Capacitance Diaphragm Gauge M-342DG

The capacitance gauge M-342DG is a diaphragm gauge that enables accurate, stable pressure measurement with minimum zero adjustment.

This is achieved using a newly developed small silicon MEMS chip as the pressure sensor unit to minimize the influence from the outside environment such as changes in temperature, vibrations, and atmospheric pressure.

Features

  • High precision, stable pressure measurement
    ・Excellent zero point stability.
    ・Has low temperature dependence providing excellent stability without the need of a temperature
      adjustment mechanism.
    ・Excellent anti-vibration noise performance.

  • Compact and low power consumption
    ・200g, W46mm × H49mm × L70mm compact, lightweight.*1
    ・Power consumption 0.5W.

    *1:Size and weight of the coupling NW16 specifications

Applications


Supports a wide range of general industy applications such as medical and food in addition to semiconductor manufacturing equipment, panel display munufacturing equipment, and other vacuum equipment.*2

 *2:Not suitable for applications where corrosive gas is used.
      Please consult us for details.

Specifications

TypeM-342DG
-1D-1N-11-12-13
Full scale pressure(Pa) 13.33 133.31.333k13.33k133.3k
                            (Torr)0.11101001000
Accuracy(% of reading)0.20(at 23℃)
Zero temperature
drift coefficient(% of F.S./℃)
0.010.0050.002
Span temperature
drift coefficient(% of reading/℃)
0.010.005
Resolution(% of Full-scale)0.010.005
Lowest Reading(% of Full-scale)0.01
Lowest Suggested Pressure for
Reading(% of Full-scale)
0.05
Lowest Suggested Pressure for
Control(% of Full-scale)
0.5
Response time(msec)10030
pressure limit(Pa)200 kPa(absolute pressure) However, 130 kPa(absolute pressure)for
M-342DG-1D(for NW16 & NW25, inner area must not be at
positive pressure)
Input voltage(VDC)+13.5~26.4
Power consumtion(W)0.5 or less
Signal output(VDC)0 to 10
Operating temperature(℃)0 to 50
Storage temperature(℃)-20 to 70(not operating)
Maximum cable length(m)100(0.3mm2)
Zero points adjustment methodspush switch,remote input
Connector typeD-sub 9 pin male(mating screw:#4-40inch)
Materials exposed to vacuumSi,Glass,SUS304,sus316,Fluorine Rubber
Flange shapeNW16,NW25,8-VCR,φ70ICF
Degree of protectionIP40
StandardsLow Voltage Directive, EMC Directive, RoHS Directive
Security Export Control RegulationNot applicable
DisplayM-601GC(1ch)、M-603GC(3c)

Dimensions

Capacitance Diaphragm Gauge M-342DG


价格
¥0.00